Supporting boat foot for isostatic pressing graphite boat for third-generation semiconductor
The invention discloses a supporting boat foot for an isostatic pressing graphite boat for a third-generation semiconductor, which relates to the technical field of graphite boats and comprises a boat body, a boat foot, an electrode block, a supporting column, a floating sleeve and a hollow sleeve,...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a supporting boat foot for an isostatic pressing graphite boat for a third-generation semiconductor, which relates to the technical field of graphite boats and comprises a boat body, a boat foot, an electrode block, a supporting column, a floating sleeve and a hollow sleeve, the scraping plates are horizontally arranged on the hollow sleeve in a penetrating manner and can freely slide on the hollow sleeve; the driving part is used for driving the plurality of scrapers to move along the radial direction of the hollow sleeve when the hollow sleeve moves upwards; and the rotating part is used for driving the scraping plate to axially rotate around the supporting column when the hollow sleeve moves upwards. When the boat body is placed in the tubular PECVD equipment, along with the lowering of the boat body, the hollow sleeve moves upwards relative to the boat feet, and the rotating part drives the plurality of scrapers to rotate around the axial direction of the supporting column, so that |
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