High-rigidity three-dimensional full-decoupling micro-motion platform
The invention provides a high-rigidity three-dimensional full-decoupling micro-motion platform. The high-rigidity three-dimensional full-decoupling micro-motion platform comprises a support; the micro-motion mechanism comprises a main body, a first execution structure, a second execution structure a...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention provides a high-rigidity three-dimensional full-decoupling micro-motion platform. The high-rigidity three-dimensional full-decoupling micro-motion platform comprises a support; the micro-motion mechanism comprises a main body, a first execution structure, a second execution structure and a third execution structure, the main body is arranged on the support, the first execution structure can be movably arranged on the main body in the first direction, a first reinforcing part is arranged on the first execution structure, and the second execution structure can be movably arranged on the first execution structure in the second direction; a second reinforcing part is arranged on the second execution structure, the third execution structure can be movably arranged on the second execution structure in the third direction, and the second driver is in transmission connection with the second execution structure; and the third driver is in transmission connection with the third execution structure. Accord |
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