Hydrotalcite adsorbent as well as preparation method and application thereof in impurity removal of chlorosilane

The invention provides a hydrotalcite adsorbent as well as a preparation method and application thereof in chlorosilane impurity removal. The preparation method comprises the following steps: S1, respectively preparing a metal salt solution and a first alkali solution; s2, synthesizing magnesium-zin...

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Bibliographische Detailangaben
Hauptverfasser: YANG HAO, ZHOU LIKUN, XU DI, SU GUOLIANG, WANG DI, MA YUJIE, LIU XINGPING, DA WEIMIN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a hydrotalcite adsorbent as well as a preparation method and application thereof in chlorosilane impurity removal. The preparation method comprises the following steps: S1, respectively preparing a metal salt solution and a first alkali solution; s2, synthesizing magnesium-zinc-aluminum hydrotalcite; s3, synthesizing a magnesium-zinc-aluminum composite metal oxide; and S4, synthesizing the hydrotalcite adsorbent. The magnesium-zinc-aluminum ternary hydrotalcite is firstly prepared by a nucleation/crystallization isolation method, then the hydration recovery magnesium-zinc-aluminum hydrotalcite with large specific surface area, good stability, wide pH application range and rich Bronsted alkaline sites is obtained by a roasting-hydration recovery method, the magnesium-zinc-aluminum hydrotalcite is applied to a chlorosilane adsorption impurity removal reaction, and the purity of the magnesium-zinc-aluminum hydrotalcite is greatly improved. And boron and phosphorus impurities can be effecti