Hard alloy composite coating deposition method

The invention provides a hard alloy composite coating deposition method. The hard alloy composite coating deposition method comprises the following steps: cleaning the surface of a hard alloy matrix; the hard alloy base body is fixed to a base body rotating frame, and heating is conducted in the vac...

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Bibliographische Detailangaben
Hauptverfasser: ZHANG FEIYANG, CHEN YIBO, LIU TIANYU, LI JIAYONG, WANG QIANRAN, ZHANG FENGYU, JI LURUI, ZHANG PENGYUE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a hard alloy composite coating deposition method. The hard alloy composite coating deposition method comprises the following steps: cleaning the surface of a hard alloy matrix; the hard alloy base body is fixed to a base body rotating frame, and heating is conducted in the vacuum state; connecting the Ti target with an arc ion plating power supply, and respectively connecting the TiAl target and the AlCrB target with a high-power pulse magnetron sputtering power supply; adjusting the bias voltage of the substrate to-150 to-250 V, starting an arc ion plating pure Ti target, adjusting the power of the target material to 0.5-1.5 kW, introducing Ar and N2, and depositing; starting a high-power pulse magnetron sputtering TiAl alloy target, adjusting the bias voltage of the substrate to-60 to-120V and the target current to 40-120A, and depositing; the AlCrB target is started, the target source power ranges from 1.0 kW to 2.5 kW, the bias voltage of the base body is adjusted to range from-80 V