Hybrid bearing shaft system structure of high-cleanliness molecular pump and molecular pump

The invention provides a hybrid bearing shafting structure of a high-cleanliness molecular pump and the molecular pump. The hybrid bearing shafting structure comprises an inner magnetic ring support, an outer magnetic ring, an inner magnetic ring, a main shaft rotor assembly, a safety bearing and a bearing seat. The inner magnetic ring is arranged on the inner magnetic ring support in a sleeving mode, the inner circumferential wall of the outer magnetic ring abuts against the outer circumferential wall of the inner magnetic ring, and the inner magnetic ring is located between the outer magnetic ring and the inner magnetic ring support; the outer magnetic ring is arranged in an inner hole in one end of the spindle rotor assembly; the safety bearing is arranged in an inner hole of the inner magnetic ring support and located in the main shaft rotor assembly. The bearing seat is installed at the other end of the spindle rotor assembly. The permanent magnet bearing and the mechanical bearing are combined to form a