Method and device for processing resonant structure of micro-hemispherical gyroscope with skirt teeth

The invention discloses a method and a device for processing a resonant structure of a micro-hemispherical gyroscope with skirt teeth. The processing method comprises the following steps of: clicking and processing a contour point array of the skirt teeth on the resonant structure by using femtosecond laser according to a given interval; performing ultrasonic chemical etching on the resonant structure in an etching tank to completely release the skirt tooth structure; the device comprises a laser processing unit and a jig assembly used for fixing the resonant structure, and further comprises a surface mounting tool used for conducting laser processing on the resonant structure and a corrosion clamp used for corrosion operation. According to the method, the surface damage problems such as microcracks generated by traditional laser direct cutting can be effectively avoided, and the Q value and damping uniformity of the micro-hemispherical gyroscope are improved; the method has the advantages of being better in