Photoacoustic spectrometry gas detection device
The invention provides a photoacoustic spectrometry gas detection device. The photoacoustic measurement cell comprises a substrate, a photoacoustic measurement cell main body, an electromagnetic radiation source, an acoustic transducer and an MEMS switch, wherein the photoacoustic measurement cell m...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a photoacoustic spectrometry gas detection device. The photoacoustic measurement cell comprises a substrate, a photoacoustic measurement cell main body, an electromagnetic radiation source, an acoustic transducer and an MEMS switch, wherein the photoacoustic measurement cell main body is positioned on the substrate and forms a photoacoustic measurement cell with the substrate; the electromagnetic radiation source is used for emitting electromagnetic radiation into the photoacoustic measurement cell; the acoustic transducer is arranged on the substrate and is positioned in the photoacoustic measurement cell; by controlling the MEMS switch to be switched between the first state and the second state, when gas to be measured needs to enter the photoacoustic measuring cell, the photoacoustic measuring cell is communicated with the outside through the air hole, and the photoacoustic measuring cell is completely sealed by the MEMS switch to be isolated from the outside during gas measurement; |
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