Electrorheological tool, electrorheological tool setting device and electrorheological tool setting method

The invention relates to an electrorheological tool, an electrorheological tool setting device and an electrorheological tool setting method. The electrorheological cutter comprises a non-metal shaft arranged in the Z-axis direction, an electrode disc arranged at the bottom of the non-metal shaft, electrodes symmetrically arranged at the two ends of the bottom of the electrode disc along the non-metal shaft and spaced from each other, first magnets arranged at the bottoms of the electrodes, and an electrode blocking piece arranged between the two electrode gaps. The length of the electrode blocking piece in the Z-axis direction is not larger than the length of the electrode in the Z-axis direction. The electrorheological tool setting device comprises an electrorheological tool, a polishing solution storage tank, a second magnet, a magnetometer and a stop plate. The electrorheological tool setting method comprises the step of determining a polishing gap required between a silicon wafer and an electrode by adju