Electrostatic chuck and preparation method thereof

The invention relates to the technical field of semiconductors, in particular to an electrostatic chuck and a preparation method thereof.The electrostatic chuck comprises an electrode, a first insulating layer, a second insulating layer, a first film electrode and a second film electrode, and the fi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAN TAIDE, JU ZICHEN, NIU XINPING, FENG PENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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