Electrostatic chuck and preparation method thereof

The invention relates to the technical field of semiconductors, in particular to an electrostatic chuck and a preparation method thereof.The electrostatic chuck comprises an electrode, a first insulating layer, a second insulating layer, a first film electrode and a second film electrode, and the first insulating layer is attached to the surface of the electrode; the first film electrode is attached to the first insulating layer; the second thin film electrode is attached to the first insulating layer, and the second thin film electrode is in contact with the first thin film electrode and forms at least one contact point for temperature measurement; the second insulating layer is attached to the first insulating layer, and the first thin film electrode and the second thin film electrode are located between the first insulating layer and the second insulating layer. The electrostatic chuck can reliably detect the temperature, the overall structure of the electrostatic chuck is small, and the original structure