Micromirror chip design analysis method based on multi-physics field coupling

The invention discloses an efficient micromirror chip analysis method based on multi-physics field coupling, and belongs to the field of micro electro mechanical systems, and the method comprises the steps: building a mapping relation between a comb tooth deflection angle and a torque, carrying out the approximate period boundary condition processing calculation of comb teeth, and obtaining the mapping relation between the comb tooth deflection angle and the torque; and verifying the single-axis adjustable micro-mirror electrostatic driver according to the mapping relation. And finally, a finite element method is used for simulating the complex double-shaft electrostatic driver, so that frequency domain analysis of thermal viscosity acoustics and mechanical coupling can be performed on the double-shaft electrostatic driver more quickly, and the scheme can perform more efficient optimization design on the double-shaft adjustable micro-mirror electrostatic driver. 本发明公开了一种高效的基于多物理场耦合的微镜芯片分析方法，属于微机电系统领域，包括：建立梳齿偏