Semiconductor structure and manufacturing method thereof, chip and photon computing system

The invention relates to the field of semiconductors, and provides a semiconductor structure and a manufacturing method thereof, a chip and a photon computing system.The manufacturing method of the semiconductor structure comprises the steps that a multi-layer structure is provided, and the multi-la...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MENG HUAIYU, SHEN YICHEN, ZHU XUANTING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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