Electrostatic micropump and method for producing electrostatic micropump
One embodiment according to the present invention is an electrostatic micropump comprising a diaphragm arrangement comprising a diaphragm and a first electrode structure. The electrostatic micropump further includes a valve arrangement comprising an inlet check valve and an outlet check valve, where...
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| creator | RICHTER MARTIN WIELAND ROBERT LEISTNER HENRY WACKER MARTIN |
| description | One embodiment according to the present invention is an electrostatic micropump comprising a diaphragm arrangement comprising a diaphragm and a first electrode structure. The electrostatic micropump further includes a valve arrangement comprising an inlet check valve and an outlet check valve, where the diaphragm arrangement and the valve arrangement at least partially enclose the pump chamber. The electrostatic micropump also includes a second electrode structure arranged to form an electrostatic driver with the first electrode structure. The electrostatic driver is configured to deflect the diaphragm. The electrostatic micropump further comprises at least one anti-blocking bump arranged between the first electrode structure and the second electrode structure, where in an inactive state of the micropump, a spacing between the first electrode structure and the second electrode structure varies from a peripheral region of the pump chamber toward a central region of the pump chamber, wherein the peripheral regi |
| format | Patent |
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The electrostatic micropump further includes a valve arrangement comprising an inlet check valve and an outlet check valve, where the diaphragm arrangement and the valve arrangement at least partially enclose the pump chamber. The electrostatic micropump also includes a second electrode structure arranged to form an electrostatic driver with the first electrode structure. The electrostatic driver is configured to deflect the diaphragm. The electrostatic micropump further comprises at least one anti-blocking bump arranged between the first electrode structure and the second electrode structure, where in an inactive state of the micropump, a spacing between the first electrode structure and the second electrode structure varies from a peripheral region of the pump chamber toward a central region of the pump chamber, wherein the peripheral regi</description><language>chi ; eng</language><subject>BLASTING ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS ; PUMPS ; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ; WEAPONS</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230822&DB=EPODOC&CC=CN&NR=116635630A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230822&DB=EPODOC&CC=CN&NR=116635630A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>RICHTER MARTIN</creatorcontrib><creatorcontrib>WIELAND ROBERT</creatorcontrib><creatorcontrib>LEISTNER HENRY</creatorcontrib><creatorcontrib>WACKER MARTIN</creatorcontrib><title>Electrostatic micropump and method for producing electrostatic micropump</title><description>One embodiment according to the present invention is an electrostatic micropump comprising a diaphragm arrangement comprising a diaphragm and a first electrode structure. The electrostatic micropump further includes a valve arrangement comprising an inlet check valve and an outlet check valve, where the diaphragm arrangement and the valve arrangement at least partially enclose the pump chamber. The electrostatic micropump also includes a second electrode structure arranged to form an electrostatic driver with the first electrode structure. The electrostatic driver is configured to deflect the diaphragm. The electrostatic micropump further comprises at least one anti-blocking bump arranged between the first electrode structure and the second electrode structure, where in an inactive state of the micropump, a spacing between the first electrode structure and the second electrode structure varies from a peripheral region of the pump chamber toward a central region of the pump chamber, wherein the peripheral regi</description><subject>BLASTING</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</subject><subject>PUMPS</subject><subject>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPBwzUlNLinKLy5JLMlMVsjNTC7KLyjNLVBIzEtRyE0tychPUUjLL1IoKMpPKU3OzEtXSMWugYeBNS0xpziVF0pzMyi6uYY4e-imFuTHpxYXJCan5qWWxDv7GRqamRmbmhkbOBoTowYAIg01Vw</recordid><startdate>20230822</startdate><enddate>20230822</enddate><creator>RICHTER MARTIN</creator><creator>WIELAND ROBERT</creator><creator>LEISTNER HENRY</creator><creator>WACKER MARTIN</creator><scope>EVB</scope></search><sort><creationdate>20230822</creationdate><title>Electrostatic micropump and method for producing electrostatic micropump</title><author>RICHTER MARTIN ; WIELAND ROBERT ; LEISTNER HENRY ; WACKER MARTIN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN116635630A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>BLASTING</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS</topic><topic>PUMPS</topic><topic>PUMPS FOR LIQUIDS OR ELASTIC FLUIDS</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>RICHTER MARTIN</creatorcontrib><creatorcontrib>WIELAND ROBERT</creatorcontrib><creatorcontrib>LEISTNER HENRY</creatorcontrib><creatorcontrib>WACKER MARTIN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>RICHTER MARTIN</au><au>WIELAND ROBERT</au><au>LEISTNER HENRY</au><au>WACKER MARTIN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Electrostatic micropump and method for producing electrostatic micropump</title><date>2023-08-22</date><risdate>2023</risdate><abstract>One embodiment according to the present invention is an electrostatic micropump comprising a diaphragm arrangement comprising a diaphragm and a first electrode structure. The electrostatic micropump further includes a valve arrangement comprising an inlet check valve and an outlet check valve, where the diaphragm arrangement and the valve arrangement at least partially enclose the pump chamber. The electrostatic micropump also includes a second electrode structure arranged to form an electrostatic driver with the first electrode structure. The electrostatic driver is configured to deflect the diaphragm. The electrostatic micropump further comprises at least one anti-blocking bump arranged between the first electrode structure and the second electrode structure, where in an inactive state of the micropump, a spacing between the first electrode structure and the second electrode structure varies from a peripheral region of the pump chamber toward a central region of the pump chamber, wherein the peripheral regi</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS |
| title | Electrostatic micropump and method for producing electrostatic micropump |
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