Electrostatic micropump and method for producing electrostatic micropump

One embodiment according to the present invention is an electrostatic micropump comprising a diaphragm arrangement comprising a diaphragm and a first electrode structure. The electrostatic micropump further includes a valve arrangement comprising an inlet check valve and an outlet check valve, where the diaphragm arrangement and the valve arrangement at least partially enclose the pump chamber. The electrostatic micropump also includes a second electrode structure arranged to form an electrostatic driver with the first electrode structure. The electrostatic driver is configured to deflect the diaphragm. The electrostatic micropump further comprises at least one anti-blocking bump arranged between the first electrode structure and the second electrode structure, where in an inactive state of the micropump, a spacing between the first electrode structure and the second electrode structure varies from a peripheral region of the pump chamber toward a central region of the pump chamber, wherein the peripheral regi