Semiconductor leveling and focusing workbench

The invention provides a semiconductor leveling and focusing workbench which comprises a working platform used for containing wafers, a plurality of sets of adjusting devices are evenly installed on the working platform, and the wafers contained on the working platform are synchronously leveled and...

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG QI, FU YOUYIN, YANG TAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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