Inert gas sample transfer for beam system

Various methods for transferring a sample within an inert gas environment to and from a beam system are provided. In one example, a sample transfer compartment includes a container configured to store a sample during transfer, where the container is adjustable between a closed configuration and an open configuration; an inert gas storage chamber coupled to the container and configured to store an inert gas; and a valve coupled to the inert gas storage chamber and the container and configured to selectively allow the inert gas to flow from the inert gas storage chamber to the container when the container is in the closed configuration. In this manner, the sample may be maintained in an inert gas environment during transport and while the beam system vacuum chamber is vented, thereby reducing exposure of the sample and subsequently reducing the rate of chemical reactions such as oxidation or nitridation of the sample. 提供了用于将惰性气体环境内的样本转移到射束系统和从射束系统转移样本的各种方法。在一个示例中，一种样本转移舱包括：容器，该容器被配置为在传送期间储存样本，其中该容器能够在闭合构型和开启构型之