Motion control method of photoetching machine workpiece table and related device

The invention discloses a motion control method of a photoetching machine workpiece table and a related device, and relates to the technical field of photoetching machines, and the motion control method comprises the following steps: carrying out iteration processing on a prediction error of the photoetching machine workpiece table through a feedforward compensation controller to obtain feedforward output; the prediction error is the deviation between the expected displacement of the photoetching machine workpiece at the first moment and the actual displacement at the current moment; processing the actual error of the photoetching machine workpiece table by taking the PIV controller as a feedback link to obtain feedback output; the actual error is the deviation between the expected displacement of the photoetching machine workpiece table at the current moment and the actual displacement of the photoetching machine workpiece table at the current moment; according to the feedforward output, the feedback output