Resonator structure of maple-leaf-shaped MEMS (micro-electromechanical system) annular vibrating gyroscope

The invention provides a maple-leaf-shaped MEMS annular vibrating gyroscope harmonic oscillator structure. The maple-leaf-shaped MEMS annular vibrating gyroscope harmonic oscillator structure comprises a substrate, an annular harmonic oscillator and electrodes, the annular harmonic oscillator is bonded with the substrate, and comprises an annular resonant mass with a cavity, a central anchor point arranged in the center of the inner cavity of the annular resonant mass, and a plurality of maple-leaf-shaped elastic supporting beam structures connected between the central anchor point and the annular resonant mass; the electrodes are bonded with the substrate and comprise a driving electrode, a detection electrode, a first control electrode, a second control electrode and a grounding electrode. Stress concentration can be avoided, and the influence of residual stress is reduced; meanwhile, the supporting structure is simple and naturally symmetrical, the process is easy to implement, the influence of machining e