Compound, leveling agent, coating composition, resist composition, and article

Provided is a compound that functions as a leveling agent that does not cause defects on the surface of a coating film and imparts high smoothness to the coating film. Specifically disclosed is a compound which has a polymer block of a polymerizable monomer at each of both ends of a silicone chain....

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Bibliographische Detailangaben
Hauptverfasser: NOGUCHI YUKI, UENO JUNPEI, NOGUCHI JUN, SUZUKI HIDEYA, HATASE MASAYUKI, SASAMOTO SHIN, SHIMIZU RYOHEI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Provided is a compound that functions as a leveling agent that does not cause defects on the surface of a coating film and imparts high smoothness to the coating film. Specifically disclosed is a compound which has a polymer block of a polymerizable monomer at each of both ends of a silicone chain. 提供:作为在涂膜表面不产生缺陷、对涂膜赋予高的平滑性的流平剂而发挥功能的化合物。具体而言,一种化合物,其在有机硅链的两末端分别具有聚合性单体的聚合物嵌段。