MEASUREMENT SYSTEM AND COHERENT ADJUSTER

The metrology system (400) includes a multi-source radiation system. The multi-source radiation system includes a waveguide arrangement (502) and is configured to generate one or more radiation beams. The metrology system (400) further comprises a coherence adjuster (500), and the coherence adjuster...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GOORDEN SEBASTIANUS ADRIANUS, ERALP MICHAEL, HUISMAN SIMON R, SOKOLOV SERGEY, PELLEMANS HENRICUS PETRUS MARIA, LIAN JIN, KRUSE JUSTIN L
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!