MEASUREMENT SYSTEM AND COHERENT ADJUSTER

The metrology system (400) includes a multi-source radiation system. The multi-source radiation system includes a waveguide arrangement (502) and is configured to generate one or more radiation beams. The metrology system (400) further comprises a coherence adjuster (500), and the coherence adjuster...

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Bibliographische Detailangaben
Hauptverfasser:	GOORDEN SEBASTIANUS ADRIANUS, ERALP MICHAEL, HUISMAN SIMON R, SOKOLOV SERGEY, PELLEMANS HENRICUS PETRUS MARIA, LIAN JIN, KRUSE JUSTIN L
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The metrology system (400) includes a multi-source radiation system. The multi-source radiation system includes a waveguide arrangement (502) and is configured to generate one or more radiation beams. The metrology system (400) further comprises a coherence adjuster (500), and the coherence adjuster (500) comprises a multimode waveguide device (504). The multimode waveguide arrangement (504) includes an input configured to receive one or more radiation beams from the multi-source radiation system (514) and an output (518) configured to output coherently adjusted radiation beams for irradiating the target (418). The metrology system (400) also includes an actuator (506) coupled to the waveguide arrangement (502) and configured to actuate the waveguide arrangement (502) in order to vary an impact characteristic of the one or more radiation beams at an input of the multimode waveguide arrangement (504). 量测系统(400)包括多源辐射系统。多源辐射系统包括波导装置(502)并且多源辐射系统被配置为生成一个或多个辐射束。量测系统(400)还包括相干调整器(500)，相干调整器(500)包括多模波导装置(504)。多模波导装