Abrasive/polishing system and method with proximity sensor

An exemplary grinder/polisher system includes: a sample holder configured to hold a sample; a platen; an actuator configured to move at least one of the sample holder and the platen; a sensor configured to detect an object within a field of view of the sensor; and a controller configured to control...

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Bibliographische Detailangaben
Hauptverfasser: SCHAEFER ROLAND, ANDREW NOCOM
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:An exemplary grinder/polisher system includes: a sample holder configured to hold a sample; a platen; an actuator configured to move at least one of the sample holder and the platen; a sensor configured to detect an object within a field of view of the sensor; and a controller configured to control movement of the actuator and stop the actuator in response to the sensor detecting an object when the actuator moves. 一种示例性研磨机/抛光机系统包括:样本固持器,该样本固持器被配置成固定样本;台板;致动器,该致动器被配置成移动该样本固持器和该台板中的至少一者;传感器,该传感器被配置成检测该传感器的视野内的物体;以及控制器,该控制器被配置成控制该致动器的移动,并且在该致动器移动时响应于该传感器检测到物体而停止该致动器。