High performance ion source grid

The high-performance ion source grid mesh comprises a fixing plate, limiting grooves and threaded holes, lantern rings are arranged on outer rings of the upper end face and the lower end face of the fixing plate, the upper lantern ring is sleeved with an upper frame, the lower lantern ring is sleeved with a lower frame, and the limiting grooves are formed in the upper end face of the upper frame and the lower end face of the lower frame. An accelerating device is arranged in the upper limiting groove, a speed reducing device is arranged in the lower limiting groove, threaded holes are formed in the middle of the right side of the outer ring of the upper frame and the middle of the right side of the outer ring of the lower frame, the threaded holes communicate with the limiting grooves, locking pieces are arranged in inner cavities of the threaded holes, and the device is simple in structure and convenient to operate and effectively improves the coating precision. 本发明公开了高性能离子源栅网，包括固定板、限位槽和螺纹孔，所述固定板上下端面外圈均设置有套环