Method for preparing Mg67Zn28Ca5 amorphous film on pure magnesium surface by magnetron sputtering
The embodiment of the invention discloses a method for preparing an Mg67Zn28Ca5 amorphous film on a pure magnesium surface by adopting magnetron sputtering, which is used for solving the technical problems of poor corrosion resistance and high degradation rate in a human body of the existing pure ma...
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| creator | LI YANFANG DUAN YU LI WEIRONG XIAO LIBING YANG XIANGJIE LIU PEIYU XIAO WENJING GONG MENGQI LI ZHENGNAN LI RONGHUI |
| description | The embodiment of the invention discloses a method for preparing an Mg67Zn28Ca5 amorphous film on a pure magnesium surface by adopting magnetron sputtering, which is used for solving the technical problems of poor corrosion resistance and high degradation rate in a human body of the existing pure magnesium surface. The preparation method provided by the invention comprises the following steps: smelting intermediate alloy blocks Mg80Zn20 and Mg70Ca30 which are prepared in advance and a pure Zn block to obtain an Mg67Zn28Ca5 alloy target material, putting the Mg67Zn28Ca5 alloy target material on a target position of a magnetron sputtering vacuum chamber, ultrasonically cleaning a treated Si sheet, putting the cleaned Si sheet on a sample table of the magnetron sputtering vacuum chamber, and preparing the Mg67Zn28Ca5 amorphous film on the Si sheet through magnetron sputtering, and verifying by using an X-ray diffraction method to determine that the film on the Si sheet is the Mg67Zn28Ca5 amorphous film. And fina |
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The preparation method provided by the invention comprises the following steps: smelting intermediate alloy blocks Mg80Zn20 and Mg70Ca30 which are prepared in advance and a pure Zn block to obtain an Mg67Zn28Ca5 alloy target material, putting the Mg67Zn28Ca5 alloy target material on a target position of a magnetron sputtering vacuum chamber, ultrasonically cleaning a treated Si sheet, putting the cleaned Si sheet on a sample table of the magnetron sputtering vacuum chamber, and preparing the Mg67Zn28Ca5 amorphous film on the Si sheet through magnetron sputtering, and verifying by using an X-ray diffraction method to determine that the film on the Si sheet is the Mg67Zn28Ca5 amorphous film. 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The preparation method provided by the invention comprises the following steps: smelting intermediate alloy blocks Mg80Zn20 and Mg70Ca30 which are prepared in advance and a pure Zn block to obtain an Mg67Zn28Ca5 alloy target material, putting the Mg67Zn28Ca5 alloy target material on a target position of a magnetron sputtering vacuum chamber, ultrasonically cleaning a treated Si sheet, putting the cleaned Si sheet on a sample table of the magnetron sputtering vacuum chamber, and preparing the Mg67Zn28Ca5 amorphous film on the Si sheet through magnetron sputtering, and verifying by using an X-ray diffraction method to determine that the film on the Si sheet is the Mg67Zn28Ca5 amorphous film. 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The preparation method provided by the invention comprises the following steps: smelting intermediate alloy blocks Mg80Zn20 and Mg70Ca30 which are prepared in advance and a pure Zn block to obtain an Mg67Zn28Ca5 alloy target material, putting the Mg67Zn28Ca5 alloy target material on a target position of a magnetron sputtering vacuum chamber, ultrasonically cleaning a treated Si sheet, putting the cleaned Si sheet on a sample table of the magnetron sputtering vacuum chamber, and preparing the Mg67Zn28Ca5 amorphous film on the Si sheet through magnetron sputtering, and verifying by using an X-ray diffraction method to determine that the film on the Si sheet is the Mg67Zn28Ca5 amorphous film. And fina</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | ALLOYS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF ALLOYS OR NON-FERROUS METALS |
| title | Method for preparing Mg67Zn28Ca5 amorphous film on pure magnesium surface by magnetron sputtering |
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