Deflection equipment with galvanometer and used in technical field of scanners

The present invention provides a deflection device (100, 200, 300, 400) for a scanner. The deflection apparatus (100, 200, 300, 400) comprises a substrate (102, 202), a galvanometer (106, 206, 304, 404), and an actuator device (110). The galvanometer (106, 206, 304, 404) is arranged in the groove (104, 204, 306, 406) in the substrate (102, 202) by means of a connector device (108) in such a way that the galvanometer can rotate in an oscillating manner about at least two axes. The actuator device (110) causes the galvanometer (106, 206, 304, 404) to oscillate. The actuator device (110) is arranged in one or more of the grooves (112A to D) in the substrate (102, 202) surrounding the groove (104, 204, 306, 406) such that a change in a shape of the actuator device (110) causes movement in the substrate (102, 202), thereby causing oscillatory movement of the galvanometer (106, 206, 304, 404). 本发明提供了一种用于扫描仪的偏转设备(100、200、300、400)。所述偏转设备(100、200、300、400)包括衬底(102、202)、振镜(106、206、304、404)和致动器装置(110)。所述振镜(106、206、304、40