Production process station adding method and system, semiconductor manufacturing system and electronic equipment

The invention relates to a production process station adding method and system, a semiconductor manufacturing system, electronic equipment and a computer readable storage medium. The production process station adding method comprises the following steps: acquiring production data before station addi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SU SHENGHUA, FANG CANYUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COMPUTING COUNTING DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES PHYSICS SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR
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