Production process station adding method and system, semiconductor manufacturing system and electronic equipment
The invention relates to a production process station adding method and system, a semiconductor manufacturing system, electronic equipment and a computer readable storage medium. The production process station adding method comprises the following steps: acquiring production data before station addi...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention relates to a production process station adding method and system, a semiconductor manufacturing system, electronic equipment and a computer readable storage medium. The production process station adding method comprises the following steps: acquiring production data before station adding and station adding data: integrating the production data before station adding and the station adding data, and acquiring production data after station adding; and judging whether the production flow after station adding is correct or not according to the production materials after station adding. According to the embodiment of the invention, the station adding setting accuracy can be improved, the correct station adding data can be ensured in all directions, production process errors caused by station adding can be prevented, misoperation can be prevented, and the labor cost can be effectively saved.
本申请涉及一种生产流程加站方法、系统、半导体制造系统、电子设备以及计算机可读存储介质。其中,生产流程加站方法包括:获取加站前生产资料以及加站资料:整合加站前生产资料以及加站资料,获取加站后生产资料;根据加站后生产资料,判断加 |
---|