Sheet conveying air leakage detection device and method and sheet conveying device and method

The invention relates to the technical field of semiconductors, in particular to a wafer conveying air leakage detection device and method and a wafer conveying device and method.The wafer conveying air leakage detection device is applied to epitaxial equipment, and the epitaxial equipment comprises a conveying cavity and a reaction cavity; the transfer wafer air leakage detection device comprises a transition cavity and an air charging device for charging inert gas into the transition cavity and the transfer cavity, the transfer cavity is communicated with the reaction cavity through the transition cavity, a first gate valve is arranged between the transfer cavity and the transition cavity, a second gate valve is arranged between the transition cavity and the reaction cavity, a first vacuum gauge is arranged in the transfer cavity, and a second vacuum gauge is arranged in the reaction cavity. An oxygen sensor and a second vacuum gauge are arranged in the transition cavity, and whether an air leakage point ex