Inner support clamp for disassembling thermal field thermal insulation cylinder of single crystal furnace

The invention discloses an inner support clamp for disassembling a thermal field thermal insulation cylinder of a single crystal furnace, relates to the technical field of monocrystalline silicon manufacturing, and can solve a series of problems of manually disassembling the thermal insulation cylin...

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Bibliographische Detailangaben
Hauptverfasser: LI FEIJIAN, YANG YU, LU JIANHUA, HONG HUA, GUAN SHUJUN, ZENG HONGQIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an inner support clamp for disassembling a thermal field thermal insulation cylinder of a single crystal furnace, relates to the technical field of monocrystalline silicon manufacturing, and can solve a series of problems of manually disassembling the thermal insulation cylinder. The invention relates to an inner support clamp for dismounting a thermal field insulation cylinder of a single crystal furnace, which comprises a limiting frame comprising at least two radially arranged limiting arms; the center rod assembly is perpendicular to the limiting frame and is telescopic in length; the inner supporting units are distributed in the circumferential direction of the center rod assembly, the number of the inner supporting units is at least two, each inner supporting unit comprises a connecting rod assembly, the connecting rod assemblies are rotationally connected with the limiting arms, and the two ends of the connecting rod assemblies are movably connected with the top of the center ro