Direct writing filling device for wafer channel

The invention discloses a direct-writing filling device for a wafer channel, and belongs to the technical field of wafer channel filling, the direct-writing filling device comprises a frame body, an eccentric rotating assembly is vertically arranged on the side wall of the frame body, an elastic flo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: XIE BIN, WU HAO, XU ZHOULONG, YIN ZHOUPING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a direct-writing filling device for a wafer channel, and belongs to the technical field of wafer channel filling, the direct-writing filling device comprises a frame body, an eccentric rotating assembly is vertically arranged on the side wall of the frame body, an elastic flow channel control rod is vertically arranged at the lower end of the frame body in a penetrating mode, and the elastic flow channel control rod is perpendicular to the axis of the eccentric rotating assembly; a feeding assembly is arranged below the frame body, a feeding runner is arranged in the feeding assembly, a charging assembly communicated with the interior of the feeding runner is arranged on the side wall of the feeding assembly, the lower end of the elastic runner control rod is located in the feeding runner, and the upper end of the elastic runner control rod makes contact with the output end of the eccentric rotating assembly; when the eccentric rotating assembly works, the elastic runner control rod is