Temperature control device, temperature control system and integrated circuit processing system for temperature compensation

The invention discloses a temperature control device, a temperature control system and an integrated circuit processing system for temperature compensation. The temperature control device comprises a temperature controller and an electric controller, and the temperature controller is electrically co...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHANG XIN, LIU ZIYANG, DONG CHUNHUI, HE MAODONG, YE SOO-JUNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONTROLLING PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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