Temperature control device, temperature control system and integrated circuit processing system for temperature compensation
The invention discloses a temperature control device, a temperature control system and an integrated circuit processing system for temperature compensation. The temperature control device comprises a temperature controller and an electric controller, and the temperature controller is electrically co...
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| Hauptverfasser: | , , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
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| Zusammenfassung: | The invention discloses a temperature control device, a temperature control system and an integrated circuit processing system for temperature compensation. The temperature control device comprises a temperature controller and an electric controller, and the temperature controller is electrically connected with the electric controller; the temperature controller comprises a housing which is provided with a first port and a second port which are used for guiding a transmission medium; the temperature control unit is arranged in the shell and used for adjusting the temperature of the transmission medium; the first temperature acquisition unit is arranged at the first port and is used for acquiring the first temperature of the transmission medium at the first port; the second temperature acquisition unit is arranged at the second port and is used for acquiring the second temperature of the transmission medium at the second port; the electric controller comprises a communication unit which is used for being in co |
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