Temperature control device, temperature control system and integrated circuit processing system for temperature compensation

Temperature control device, temperature control system and integrated circuit processing system for temperature compensation

The invention discloses a temperature control device, a temperature control system and an integrated circuit processing system for temperature compensation. The temperature control device comprises a temperature controller and an electric controller, and the temperature controller is electrically co...

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Hauptverfasser: CHANG XIN, LIU ZIYANG, DONG CHUNHUI, HE MAODONG, YE SOO-JUNG
Format: Patent
Sprache:chi ; eng
Schlagworte:
CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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creator CHANG XIN
LIU ZIYANG
DONG CHUNHUI
HE MAODONG
YE SOO-JUNG
description The invention discloses a temperature control device, a temperature control system and an integrated circuit processing system for temperature compensation. The temperature control device comprises a temperature controller and an electric controller, and the temperature controller is electrically connected with the electric controller; the temperature controller comprises a housing which is provided with a first port and a second port which are used for guiding a transmission medium; the temperature control unit is arranged in the shell and used for adjusting the temperature of the transmission medium; the first temperature acquisition unit is arranged at the first port and is used for acquiring the first temperature of the transmission medium at the first port; the second temperature acquisition unit is arranged at the second port and is used for acquiring the second temperature of the transmission medium at the second port; the electric controller comprises a communication unit which is used for being in co
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subjects CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
title Temperature control device, temperature control system and integrated circuit processing system for temperature compensation
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