Optical element surface defect detection method and related equipment

The embodiment of the invention discloses an optical element surface defect detection method and related equipment, which can effectively remove textural features on the surface of an optical element, separate defects on the surface of the optical element and accurately know the defects of the optical element, and have the advantages of good direction identification, accurate separation and complete defect feature extraction. The method has important application value in precision optical detection and surface measurement. The method comprises the following steps: decomposing surface data of the precision optical element by adopting NSST to obtain a plurality of standard sub-blocks with different scales and different directions; l0 gradient minimization is used for eliminating texture values of all standard sub-blocks except the highest-scale sub-block, so that a plurality of target sub-blocks only containing defects of different scales and directions are obtained, and the highest-scale sub-block represents t