Nano-film strain gauge, spoke force sensor and preparation method of nano-film strain gauge

The invention discloses a nano-film strain gauge, a spoke force sensor and a preparation method thereof, and belongs to the technical field of sensors. The strain gauge comprises the following layers from bottom to top: a steel sheet, the surface of which is provided with a transition layer; an insulating layer is arranged on the surface of the transition layer; a strain layer is arranged on part of the surface of the insulating layer; a protective layer is arranged on the surface of the rest part of the insulating layer; part of the surface of the strain layer is provided with a bonding pad. A protective layer is arranged on the residual part of the surface of the strain layer; and the strain layer is composed of a NiCrAlFeMnNbSi layer and a NiCr layer. According to the preparation method of the nano-film strain gauge, the nano-film strain gauge with good stability performance is prepared by adjusting the composition elements in the NiCrAlFeMnNbSi layer. 本发明公开了一种纳米薄膜应变片、轮辐力传感器及其制备方法，属于传感器技术领域；该应变片由下至上包括以下各层：