Bearing head for chemical mechanical polishing and using method thereof

The invention discloses a bearing head for chemical mechanical polishing and a using method of the bearing head. The bearing head comprises a main base body and a plurality of auxiliary base bodies, the elastic film is connected to the lower portion of the main base body through a bearing disc; the detection assembly is arranged in the mounting hole of the bearing disc and corresponds to one cavity of the elastic film, and the corresponding cavity of the detection assembly is a detection cavity; the detection assembly comprises a pin shaft, a sealing piece, an elastic piece and a fixing piece, the pin shaft is arranged in the vent hole of the bearing disc in a clearance mode, the sealing piece and the elastic piece are arranged on the peripheral side of the pin shaft in a sleeving mode, the sealing piece is arranged at the bottom of the mounting hole, and the elastic piece is arranged on the upper portion of the pin shaft; the fixing piece is connected to the upper portion of the mounting hole in a sealed mod