Wafer detection device, mechanical arm and wafer monitoring method

The invention provides a wafer detection device, a mechanical arm and a wafer monitoring method.The wafer monitoring device comprises at least two sensors, each supporting arm part is correspondingly provided with one sensor, and each sensor comprises a light emitting end and a light receiving end;...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FU ZICHENG, DANG ZHIWEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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