Semiconductor defect identification method and device, terminal equipment and storage medium

The invention discloses a semiconductor defect identification method and apparatus, a terminal device and a storage medium. The method comprises the steps of obtaining a to-be-detected chip alignment picture; the to-be-detected chip alignment picture is input into a preset defect recognition model for recognition, a recognition result is obtained, and the defect recognition model is obtained based on a preset self-encoding decoder model and a preset defect classification model. According to the invention, the problem of low accuracy of semiconductor defect identification is solved, the adaptability of semiconductor defect identification is enhanced, and the efficiency of semiconductor defect identification is improved. 本发明公开了一种半导体缺陷识别方法、装置、终端设备以及存储介质，其方法包括：获取待检测的芯片对齐图片；将所述待检测的芯片对齐图片，输入预设的缺陷识别模型进行识别，获得识别结果，其中，所述缺陷识别模型基于预设的自编码解码器模型以及预设的缺陷分类模型得到。本发明解决了半导体缺陷识别准确率低下的问题，增强了半导体缺陷识别的自适应性，提高了半导体缺陷识别的效率。