Method for screening wafer test parameters

The invention provides a method for screening wafer test parameters, which comprises the following steps of: providing a wafer to be tested which comprises a plurality of crystal grains; testing each test item on all the crystal grains under the full reference current gear, including a baking proces...

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1. Verfasser: SUN LIJIN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a method for screening wafer test parameters, which comprises the following steps of: providing a wafer to be tested which comprises a plurality of crystal grains; testing each test item on all the crystal grains under the full reference current gear, including a baking process between the first test item and the second test item, and storing test results of all the test items of each crystal grain in a wafer; and counting all test results to screen out the optimal reference current gear of each test item, so as to obtain a distribution diagram of the reference current gears and the test results and intuitively reflect the product characteristics through the wafer test of one complete item by researching the memory product with the reference current and the cell window which cannot be quantified. And only through one-time baking process, the test time is shortened, the screening time is reduced, and the complexity during screening of the wafer test parameters is also reduced. 本发明提供一种晶圆测