Filtering device and filtering method for vacuum air path of scribing machine

The embodiment of the invention provides a vacuum air path filtering device and method for a scribing machine, and relates to the technical field of scribing machines. The vacuum air path filtering device of the scribing machine comprises a vacuum working disc, a filtering water tank, a first vacuum...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SHI WEN, XU SHUANGSHUANG, ZHANG MINGMING, YU HUPING, CHEN YE, NIU ZILE
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!