Filtering device and filtering method for vacuum air path of scribing machine

The embodiment of the invention provides a vacuum air path filtering device and method for a scribing machine, and relates to the technical field of scribing machines. The vacuum air path filtering device of the scribing machine comprises a vacuum working disc, a filtering water tank, a first vacuum pipeline, a first vacuum generator and a filtering plug, the filtering water tank is communicated with the vacuum working disc and used for collecting water vapor, one end of the first vacuum pipeline is communicated with the filtering water tank, and the first vacuum generator is connected with the other end of the first vacuum pipeline. The first vacuum generator is used for vacuumizing the first vacuum pipeline to adsorb water vapor in the filtering water tank into the first vacuum pipeline, the filtering plug is arranged in the filtering water tank and communicates with the end of the first vacuum pipeline, and a flow guide groove penetrates through the bottom of the filtering plug; the filtering plug is used