Wafer carrying device and production device

The invention provides a wafer carrying device and a wafer production device. The wafer carrying device comprises a mechanical arm assembly, a rotation driving assembly, a lifting assembly and a cable assembly. The rotation driving assembly comprises a first rotation driving assembly and a second ro...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HE HAILONG, ZHU YUDONG, HOU SHUANGMING, DONG HONGDA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention provides a wafer carrying device and a wafer production device. The wafer carrying device comprises a mechanical arm assembly, a rotation driving assembly, a lifting assembly and a cable assembly. The rotation driving assembly comprises a first rotation driving assembly and a second rotation driving assembly, the cable assembly comprises an elastic cable piece, and the elastic cable piece is connected with the first rotation driving assembly and the second rotation driving assembly. The elastic cable piece is arranged below the rotary driving assembly and telescopically moves along with the lifting of the rotary driving assembly, so that the loss of the elastic cable piece caused by stretching is reduced, and the elastic cable piece can be contracted when the rotary driving assembly descends and is not bent, so that the service life of the elastic cable piece is prolonged, and the service life of the elastic cable piece is prolonged. And the service life of the elastic cable piece is greatly pro