Active molybdenum-silver-copper-titanium slurry for ceramic metallization packaging and preparation method of active molybdenum-silver-copper-titanium slurry
The invention discloses active molybdenum-silver-copper-titanium slurry for ceramic metallization packaging. The slurry is prepared from the following raw materials in parts by mass: 50-60 parts of molybdenum powder or molybdenum alloy powder, 20-25 parts of silver-copper-titanium alloy powder, 15-2...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses active molybdenum-silver-copper-titanium slurry for ceramic metallization packaging. The slurry is prepared from the following raw materials in parts by mass: 50-60 parts of molybdenum powder or molybdenum alloy powder, 20-25 parts of silver-copper-titanium alloy powder, 15-20 parts of resin, 1-2 parts of a solvent, 1-3 parts of an organic additive and 1-6 parts of an inorganic additive. Compared with the traditional active molybdenum-manganese slurry for ceramic metallization packaging, the active molybdenum-manganese slurry has the advantages that manganese-containing glass powder is replaced by a silver-copper-titanium system with higher conductivity and activity, so that the problems of low air tightness, reliability and conductivity and complicated process of brazing aluminum oxide, aluminum nitride, silicon nitride and other ceramic substrates of the molybdenum-manganese system can be effectively solved; the prepared slurry is subjected to silk-screen printing and vacuum high-tem |
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