Blending device suitable for semiconductor high-cleanliness chemical solution
The invention belongs to the technical field of high-purity blending of chemical solutions, and discloses a blending device suitable for a semiconductor high-cleanliness chemical solution, the blending device comprises a base, one side of the upper surface of the base is provided with a regulation a...
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| creator | JIAN SHUICUN ZHAO LONGSHAN JIAN JIANZHI LIN YUZHE |
| description | The invention belongs to the technical field of high-purity blending of chemical solutions, and discloses a blending device suitable for a semiconductor high-cleanliness chemical solution, the blending device comprises a base, one side of the upper surface of the base is provided with a regulation and control mechanism, and the upper surface of the base is provided with a plurality of groups of support plates. Cleaning liquid in the first feeding pipe and drying gas in the second feeding pipe alternately enter the inner cavity of the annular shell through the guide pipe on the front side, and the relative flowing speed of the cleaning liquid or the drying gas along the inner wall of the suction pipe is increased through the rotating direction, opposite to the suction pipe, of the cleaning liquid or the drying gas on the other side of the inner cavity of the annular shell; therefore, the collision strength between attachments on the inner wall of the suction pipe and the cleaning liquid or dry gas is improved, |
| format | Patent |
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Cleaning liquid in the first feeding pipe and drying gas in the second feeding pipe alternately enter the inner cavity of the annular shell through the guide pipe on the front side, and the relative flowing speed of the cleaning liquid or the drying gas along the inner wall of the suction pipe is increased through the rotating direction, opposite to the suction pipe, of the cleaning liquid or the drying gas on the other side of the inner cavity of the annular shell; therefore, the collision strength between attachments on the inner wall of the suction pipe and the cleaning liquid or dry gas is improved,</description><language>chi ; eng</language><subject>CLEANING ; CLEANING IN GENERAL ; MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING ; PERFORMING OPERATIONS ; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL ; PREVENTION OF FOULING IN GENERAL ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230725&DB=EPODOC&CC=CN&NR=116474636A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230725&DB=EPODOC&CC=CN&NR=116474636A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JIAN SHUICUN</creatorcontrib><creatorcontrib>ZHAO LONGSHAN</creatorcontrib><creatorcontrib>JIAN JIANZHI</creatorcontrib><creatorcontrib>LIN YUZHE</creatorcontrib><title>Blending device suitable for semiconductor high-cleanliness chemical solution</title><description>The invention belongs to the technical field of high-purity blending of chemical solutions, and discloses a blending device suitable for a semiconductor high-cleanliness chemical solution, the blending device comprises a base, one side of the upper surface of the base is provided with a regulation and control mechanism, and the upper surface of the base is provided with a plurality of groups of support plates. 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| language | chi ; eng |
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| subjects | CLEANING CLEANING IN GENERAL MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PREVENTION OF FOULING IN GENERAL TRANSPORTING |
| title | Blending device suitable for semiconductor high-cleanliness chemical solution |
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