Blending device suitable for semiconductor high-cleanliness chemical solution

The invention belongs to the technical field of high-purity blending of chemical solutions, and discloses a blending device suitable for a semiconductor high-cleanliness chemical solution, the blending device comprises a base, one side of the upper surface of the base is provided with a regulation a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIAN SHUICUN, ZHAO LONGSHAN, JIAN JIANZHI, LIN YUZHE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the technical field of high-purity blending of chemical solutions, and discloses a blending device suitable for a semiconductor high-cleanliness chemical solution, the blending device comprises a base, one side of the upper surface of the base is provided with a regulation and control mechanism, and the upper surface of the base is provided with a plurality of groups of support plates. Cleaning liquid in the first feeding pipe and drying gas in the second feeding pipe alternately enter the inner cavity of the annular shell through the guide pipe on the front side, and the relative flowing speed of the cleaning liquid or the drying gas along the inner wall of the suction pipe is increased through the rotating direction, opposite to the suction pipe, of the cleaning liquid or the drying gas on the other side of the inner cavity of the annular shell; therefore, the collision strength between attachments on the inner wall of the suction pipe and the cleaning liquid or dry gas is improved,