Methods and systems including pulsed bi-beam charge neutralization

A surface imaging device and surface analysis device based on secondary electron or secondary ion detection, the method comprising: a spatial scan and a DC or pulsed main excitation source generating secondary electrons or secondary ions, the secondary electrons or secondary ions being detected and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FISHER GARY L, NEGRI ROBERT E, NARUM DAVID H, BRYAN STEVEN R
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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