Methods and systems including pulsed bi-beam charge neutralization

A surface imaging device and surface analysis device based on secondary electron or secondary ion detection, the method comprising: a spatial scan and a DC or pulsed main excitation source generating secondary electrons or secondary ions, the secondary electrons or secondary ions being detected and providing a modulation signal for imaging a sample; and a bipolar flood beam for influencing the neutralization of surface charges and surface potential variations. 基于二次电子或二次离子检测的表面成像装置、表面分析装置、方法包括：空间扫描和DC或脉冲式主激发源，其产生二次电子或二次离子，所述二次电子或二次离子被检测并提供用于对样品成像的调制信号；以及双极性泛射束，用于影响表面电荷的中和以及表面电势变化。