Visible light and mid-infrared double-spectrum channel thin film device and preparation method thereof

The invention discloses a visible light and mid-infrared double-spectrum channel thin film device and a preparation method, the visible light and mid-infrared double-spectrum channel thin film device comprises a substrate and a similar long-wave-pass film system arranged on one side of the substrate...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: WU YAOSHA, SHI PENG, LIANG YITING, CHEN MINGYUAN, WANG LIRONG, LYU HUICHENG, PAN XUHUI
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention discloses a visible light and mid-infrared double-spectrum channel thin film device and a preparation method, the visible light and mid-infrared double-spectrum channel thin film device comprises a substrate and a similar long-wave-pass film system arranged on one side of the substrate, and the similar long-wave-pass film system comprises a plurality of high-refractive-index film layers and low-refractive-index film layers which are alternately plated; the high-refractive-index film layer is formed by zinc selenide or zinc sulfide through vacuum resistance evaporation, and the high-refractive-index film layer is in a pressure stress or tensile stress state through ion beam assisted deposition; the low-refractive-index film layer is formed by vacuum electron beam evaporation of fluoride, and the low-refractive-index film layer is in a tensile stress state by ion beam assisted deposition; the substrate is a sapphire substrate. According to the visible light and mid-infrared double-spectrum channel