Visible light and mid-infrared double-spectrum channel thin film device and preparation method thereof
The invention discloses a visible light and mid-infrared double-spectrum channel thin film device and a preparation method, the visible light and mid-infrared double-spectrum channel thin film device comprises a substrate and a similar long-wave-pass film system arranged on one side of the substrate...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a visible light and mid-infrared double-spectrum channel thin film device and a preparation method, the visible light and mid-infrared double-spectrum channel thin film device comprises a substrate and a similar long-wave-pass film system arranged on one side of the substrate, and the similar long-wave-pass film system comprises a plurality of high-refractive-index film layers and low-refractive-index film layers which are alternately plated; the high-refractive-index film layer is formed by zinc selenide or zinc sulfide through vacuum resistance evaporation, and the high-refractive-index film layer is in a pressure stress or tensile stress state through ion beam assisted deposition; the low-refractive-index film layer is formed by vacuum electron beam evaporation of fluoride, and the low-refractive-index film layer is in a tensile stress state by ion beam assisted deposition; the substrate is a sapphire substrate. According to the visible light and mid-infrared double-spectrum channel |
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