Vacuum equipment

According to the technical scheme, a rack is arranged, and a vacuum pump, a vacuum pump oil tank, a vacuum pump circulating oil path mechanism used for automatically changing oil of the vacuum pump and/or controlling the oil temperature and a vacuum pump air path filtering mechanism used for filteri...

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Bibliographische Detailangaben
1. Verfasser: WANG ZUMAO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:According to the technical scheme, a rack is arranged, and a vacuum pump, a vacuum pump oil tank, a vacuum pump circulating oil path mechanism used for automatically changing oil of the vacuum pump and/or controlling the oil temperature and a vacuum pump air path filtering mechanism used for filtering air entering the vacuum pump are installed on the rack to jointly form the vacuum equipment. Wherein the vacuum pump circulating oil path mechanism can ensure that oil in the vacuum pump is in a qualified (clean and free of oil shortage) state for a long time, ensure that the vacuum pump is not easy to damage and can stably run for a long time, and ensure that air entering the vacuum pump is clean enough through gas filtered by the vacuum pump air path filtering mechanism in a multi-layer manner; the service life of the vacuum pump can be effectively prolonged, finally, it can be guaranteed that vacuum equipment has the good vacuum degree, products produced through the good vacuum degree are good in quality, the