Novel wafer mechanical arm driven by direct drive motor

The novel wafer mechanical arm comprises a moving mechanism, the moving mechanism comprises a plurality of direct-drive motors and an outer cylinder, the top opening of the outer cylinder is open, a lifting assembly is arranged in the outer cylinder and driven by one direct-drive motor, and a suppor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG ZILIN, CAI YUANYUAN, WU HONGJUN, LIN HONGXI, YOU JINGHAO, DUAN YE, HUANG YUWEI, YANG SITONG, YANG AOQI, ZHENG RUIWEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The novel wafer mechanical arm comprises a moving mechanism, the moving mechanism comprises a plurality of direct-drive motors and an outer cylinder, the top opening of the outer cylinder is open, a lifting assembly is arranged in the outer cylinder and driven by one direct-drive motor, and a supporting halfpace is in transmission connection with the lifting assembly; a mechanical arm assembly is fixedly connected to the top face of the supporting halfpace, a plurality of direct drive motors are arranged in the mechanical arm assembly, and the end, away from the supporting halfpace, of the mechanical arm assembly extends out of the outer cylinder. And the lifting mechanism comprises an air floating guide rail, the air floating guide rail is fixedly connected with the extending end of the mechanical arm assembly, a plurality of air injection columns are movably connected to the air floating guide rail, and the high-precision and high-compatibility mechanical arm has high stability, high precision and high comp